Invention Grant
- Patent Title: MEMS optical sensor
- Patent Title (中): MEMS光学传感器
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Application No.: US14405938Application Date: 2013-06-06
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Publication No.: US09574956B2Publication Date: 2017-02-21
- Inventor: Kasper Reck , Christian Østergaard , Ole Hansen , Erik Vilain Thomsen
- Applicant: Technical University of Denmark
- Applicant Address: DK
- Assignee: Technical University of Denmark
- Current Assignee: Technical University of Denmark
- Current Assignee Address: DK
- Agency: Sunstein Kann Murphy & Timbers LLP
- Priority: EP12171002 20120606
- International Application: PCT/EP2013/061701 WO 20130606
- International Announcement: WO2013/182643 WO 20131212
- Main IPC: G01L1/24
- IPC: G01L1/24 ; G01L11/02 ; G01N21/55 ; G02B6/10

Abstract:
The present invention relates to an all-optical sensor utilizing effective index modulation of a waveguide and detection of a wavelength shift of reflected light and a force sensing system accommodating said optical sensor. One embodiment of the invention relates to a sensor system comprising at least one multimode light source, one or more optical sensors comprising a multimode sensor optical waveguide accommodating a distributed Bragg reflector, at least one transmitting optical waveguide for guiding light from said at least one light source to said one or more multimode sensor optical waveguides, a detector for measuring light reflected from said Bragg reflector in said one or more multimode sensor optical waveguides, and a data processor adapted for analyzing variations in the Bragg wavelength of at least one higher order mode of the reflected light.
Public/Granted literature
- US20150131100A1 MEMS Optical Sensor Public/Granted day:2015-05-14
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