Invention Grant
US09575040B2 Methods and apparatus for detection of gaseous corrosive contaminants
有权
用于检测气体腐蚀性污染物的方法和装置
- Patent Title: Methods and apparatus for detection of gaseous corrosive contaminants
- Patent Title (中): 用于检测气体腐蚀性污染物的方法和装置
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Application No.: US14265623Application Date: 2014-04-30
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Publication No.: US09575040B2Publication Date: 2017-02-21
- Inventor: S. Jay Chey , Hendrik F. Hamann , Levente I. Klein , Michael A. Schappert , Prabjit Singh
- Applicant: International Business Machines Corporation
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Scully Scott Murphy and Presser
- Main IPC: G01R27/08
- IPC: G01R27/08 ; G01N19/00 ; G01N33/00 ; G01N17/04 ; G01N17/00 ; G01N27/04

Abstract:
A corrosion sensor includes a plurality of metal strips having different thicknesses. A first metal strip with the least thickness is first employed to provide sensitive corrosion detection. After an exposed portion of the first metal strip is consumed, a second metal strip having a second least thickness can be employed to provide continued sensitive corrosion detection employing a remaining un-corroded portion of the second metal strip. The plurality of metal strips can be sequentially employed as exposed portions of thinner metal strips become unusable through complete corrosion and un-corroded exposed portions of thicker metal strips become thin enough to provide sensitive corrosion detection.
Public/Granted literature
- US20140230524A1 METHODS AND APPARATUS FOR DETECTION OF GASEOUS CORROSIVE CONTAMINANTS Public/Granted day:2014-08-21
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