Invention Grant
- Patent Title: Capacitive micromechanical acceleration sensor
- Patent Title (中): 电容式微机械加速度传感器
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Application No.: US14317575Application Date: 2014-06-27
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Publication No.: US09575088B2Publication Date: 2017-02-21
- Inventor: Matti Liukku , Ville-Pekka Rytkönen , Anssi Blomqvist
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo-shi, Kyoto
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo-shi, Kyoto
- Agency: Squire Patton Boggs (US) LLP
- Priority: FI20135714 20130628
- Main IPC: G01P15/18
- IPC: G01P15/18 ; G01P15/125 ; G01P15/00 ; G01P15/08

Abstract:
The invention relates to a capacitive micromechanical acceleration sensor comprising a first sensor, a second sensor, and a third sensor. The first sensor comprises a rotor electrode and stator electrode. The sensor comprises a first beam that is connected to a rotor electrode support structure and that is connected to the rotor electrode. The sensor comprises a second beam that is connected to the rotor electrode support structure and that is connected to the rotor electrode. The second sensor is situated in a first space circumscribed by the first beam, the first sensor, and the rotor electrode support structure. The third sensor is situated in a second space circumscribed by the second beam, the first sensor, and the rotor electrode support structure.
Public/Granted literature
- US20150000403A1 CAPACITIVE MICROMECHANICAL ACCELERATION SENSOR Public/Granted day:2015-01-01
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