Invention Grant
- Patent Title: Doping of a substrate via a dopant containing polymer film
- Patent Title (中): 通过含掺杂剂的聚合物膜掺杂衬底
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Application No.: US14699434Application Date: 2015-04-29
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Publication No.: US09576799B2Publication Date: 2017-02-21
- Inventor: Rachel A. Segalman , Peter Trefonas, III , Bhooshan C. Popere , Andrew T. Heitsch
- Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA , Rohm and Haas Electronic Materials LLC , Dow Global Technologies LLC
- Applicant Address: US MI Midland US MA Marlborough US CA Oakland
- Assignee: DOW GLOBAL TECHNOLOGIES, LLC,ROHM AND HAAS ELECTRONIC MATERIALS LLC,THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Current Assignee: DOW GLOBAL TECHNOLOGIES, LLC,ROHM AND HAAS ELECTRONIC MATERIALS LLC,THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Current Assignee Address: US MI Midland US MA Marlborough US CA Oakland
- Agency: Cantor Colburn LLP
- Main IPC: H01L21/225
- IPC: H01L21/225 ; H01L21/02 ; H01L21/22

Abstract:
Disclosed herein is a method for doping a substrate, comprising disposing a coating of a composition comprising a copolymer, a dopant precursor and a solvent on a substrate; where the copolymer is capable of phase segregating and embedding the dopant precursor while in solution; and annealing the substrate at a temperature of 750 to 1300° C. for 0.1 second to 24 hours to diffuse the dopant into the substrate. Disclosed herein too is a semiconductor substrate comprising embedded dopant domains of diameter 3 to 30 nanometers; where the domains comprise Group 13 or Group 15 atoms, wherein the embedded spherical domains are located within 30 nanometers of the substrate surface.
Public/Granted literature
- US20160035572A1 DOPING OF A SUBSTRATE VIA A DOPANT CONTAINING POLYMER FILM Public/Granted day:2016-02-04
Information query
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