Invention Grant
- Patent Title: Systems and methods for controlling wafer-breaker devices
- Patent Title (中): 用于控制晶片断路器装置的系统和方法
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Application No.: US14291397Application Date: 2014-05-30
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Publication No.: US09576826B2Publication Date: 2017-02-21
- Inventor: Cesar D. Lara
- Applicant: SKYWORKS SOLUTIONS, INC.
- Applicant Address: US MA Woburn
- Assignee: Skyworks Solutions, Inc.
- Current Assignee: Skyworks Solutions, Inc.
- Current Assignee Address: US MA Woburn
- Agency: Chang & Hale LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/304 ; H01L21/66 ; B81C1/00 ; B81C99/00
Abstract:
Systems and methods for controlling wafer-breaker devices. In some embodiments, a controller for a semiconductor wafer singulation apparatus can be configured to receive an input signal having information about at least one singulation parameter. The controller can be further configured to generate an output signal based on the input signal to effectuate an operation associated with the singulation parameter. The controller can be further configured to disable manual control of the singulation parameter. In some embodiments, such a controller can be implemented, for example, in a control module, in a kit for modifying an existing singulation apparatus, as an integral part of a singulation apparatus, or any combination thereof.
Public/Granted literature
- US20150346712A1 SYSTEMS AND METHODS FOR CONTROLLING WAFER-BREAKER DEVICES Public/Granted day:2015-12-03
Information query
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