Invention Grant
US09576876B2 Organic-inorganic hybrid thin film and method for producing the same
有权
有机 - 无机杂化薄膜及其制造方法
- Patent Title: Organic-inorganic hybrid thin film and method for producing the same
- Patent Title (中): 有机 - 无机杂化薄膜及其制造方法
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Application No.: US14413754Application Date: 2013-11-04
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Publication No.: US09576876B2Publication Date: 2017-02-21
- Inventor: Myung Mo Sung , Kyu Seok Han
- Applicant: IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY) , BASF Coatings GmbH
- Applicant Address: DE Muenster KR Seongdong-gu
- Assignee: BASF Coatings GmbH,IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
- Current Assignee: BASF Coatings GmbH,IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
- Current Assignee Address: DE Muenster KR Seongdong-gu
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: KR10-2013-0104463 20130830
- International Application: PCT/KR2013/009909 WO 20131104
- International Announcement: WO2015/030297 WO 20150305
- Main IPC: H01L51/40
- IPC: H01L51/40 ; H01L23/31 ; G02F1/1333 ; C23C16/455 ; H01L31/0203 ; H01L51/00 ; H01L51/52 ; C07F3/06 ; C07F5/06 ; H01L21/56 ; H01L23/29
Abstract:
The present invention relates to an organic-inorganic hybrid thin film and a method for preparing the same and more specifically to an organic-inorganic hybrid thin film including a stable new functional group and a method for preparing the organic-inorganic hybrid thin film that is formed by the molecular layer deposition method alternately using inorganic precursor and organic precursor.
Public/Granted literature
- US20160276241A1 ORGANIC-INORGANIC HYBRID THIN FILM AND METHOD FOR PRODUCING THE SAME Public/Granted day:2016-09-22
Information query
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