Invention Grant
- Patent Title: Semiconductor device and manufacturing method for the same
- Patent Title (中): 半导体器件及其制造方法相同
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Application No.: US14952468Application Date: 2015-11-25
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Publication No.: US09576921B2Publication Date: 2017-02-21
- Inventor: Akira Yajima , Seiji Muranaka
- Applicant: RENESAS ELECTRONICS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Shapiro, Gabor and Rosenberger, PLLC
- Priority: JP2014-246296 20141204
- Main IPC: H01L23/00
- IPC: H01L23/00

Abstract:
To improve an integration degree of a semiconductor device.The semiconductor device includes a plurality of wiring layers formed on the semiconductor substrate, a pad electrode formed on an uppermost wiring layer among the plurality of wiring layers, a base insulating film having a pad opening above the pad electrode, and a rewiring electrically connected to the pad electrode and extending over the base insulating film. Further, the semiconductor device includes a protective film covering an upper surface of the rewiring and having an external pad opening exposing part of the upper surface of the rewiring, an external pad electrode electrically connected to the rewiring through the external pad opening and extending over the protective film, and a wire connected to the external pad electrode. Part of the external pad electrode is located in a region outside the rewiring.
Public/Granted literature
- US20160163666A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR THE SAME Public/Granted day:2016-06-09
Information query
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