Invention Grant
US09576968B2 Semiconductor memory device with a three-dimensional stacked memory cell structure
有权
具有三维堆叠存储单元结构的半导体存储器件
- Patent Title: Semiconductor memory device with a three-dimensional stacked memory cell structure
- Patent Title (中): 具有三维堆叠存储单元结构的半导体存储器件
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Application No.: US14727134Application Date: 2015-06-01
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Publication No.: US09576968B2Publication Date: 2017-02-21
- Inventor: Tomoo Hishida , Yoshihisa Iwata
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Minato-ku
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-143500 20110628
- Main IPC: G11C16/04
- IPC: G11C16/04 ; H01L27/115 ; G11C5/02 ; G11C5/06 ; G11C8/12 ; G11C7/18 ; H01L27/10 ; H01L23/528 ; H01L29/792 ; G11C5/04

Abstract:
A semiconductor memory device comprises: a semiconductor substrate; a plurality of memory units provided on the semiconductor substrate and each including a plurality of memory cells that are stacked; and a plurality of bit lines formed above each of a plurality of the memory units aligned in a column direction, an alignment pitch in a row direction of the plurality of bit lines being less than an alignment pitch in the row direction of the memory units, and an end of each of the memory units aligned in the column direction being connected to one of the plurality of bit lines formed above the plurality of the memory units aligned in the column direction.
Public/Granted literature
- US20150263030A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2015-09-17
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