Invention Grant
- Patent Title: Method of forming thin film and method of manufacturing organic light-emitting display device
- Patent Title (中): 薄膜形成方法及制造有机发光显示装置的方法
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Application No.: US14877408Application Date: 2015-10-07
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Publication No.: US09577193B2Publication Date: 2017-02-21
- Inventor: Hanjun Kim
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2015-0043298 20150327
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L51/00 ; H01L51/56 ; H01L27/32 ; H01L51/52
Abstract:
A method of forming a thin film, the method including: disposing a resist portion on a substrate, the resist portion including: a first region including a first upper surface; and a second region including a second upper surface, the first upper surface disposed higher than the second upper surface and forming a step; disposing a first protection layer covering the resist portion; exposing the first upper surface; removing the first region; disposing a first thin film on the substrate; disposing a second protection layer covering the first thin film; exposing the second upper surface; removing the second region; disposing a second thin film on the substrate; and removing the first protection layer and the second protection layer.
Public/Granted literature
- US20160284997A1 METHOD OF FORMING THIN FILM AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE Public/Granted day:2016-09-29
Information query
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