Invention Grant
US09577770B2 Method for analyzing the RF performance of a probe card, detector assembly and system for analyzing the RF performance of a probe card 有权
用于分析探针卡,检测器组件和用于分析探针卡的RF性能的系统的RF性能的方法

Method for analyzing the RF performance of a probe card, detector assembly and system for analyzing the RF performance of a probe card
Abstract:
A system for analyzing a probe card comprises a signal generator adapted to generate a radio frequency test signal. a connector for inputting into the probe card the radio frequency test signal, and a detector assembly. The detector assembly comprises an RF chuck for receiving a radio frequency signal from the probe card, and a sensor configured to receive the radio frequency signal from the RF chuck. The sensor is configured to measure a magnitude of the radio frequency signal and to output a measurement signal that represents only the magnitude of the radio frequency signal. The RF chuck and the sensor are mechanically coupled.
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