Invention Grant
US09577770B2 Method for analyzing the RF performance of a probe card, detector assembly and system for analyzing the RF performance of a probe card
有权
用于分析探针卡,检测器组件和用于分析探针卡的RF性能的系统的RF性能的方法
- Patent Title: Method for analyzing the RF performance of a probe card, detector assembly and system for analyzing the RF performance of a probe card
- Patent Title (中): 用于分析探针卡,检测器组件和用于分析探针卡的RF性能的系统的RF性能的方法
-
Application No.: US14707441Application Date: 2015-05-08
-
Publication No.: US09577770B2Publication Date: 2017-02-21
- Inventor: Paul Oneil , Hanns-Georg Ochsenkuehn , Oscar Beijert
- Applicant: aps Solutions GmbH , BE Precision Technology
- Applicant Address: DE Puchheim NL SC Nunspeet
- Assignee: APS Soutions GmbH,BE Precision Technology
- Current Assignee: APS Soutions GmbH,BE Precision Technology
- Current Assignee Address: DE Puchheim NL SC Nunspeet
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H04B17/00
- IPC: H04B17/00 ; H04B17/19 ; H04B17/16 ; H04B17/12

Abstract:
A system for analyzing a probe card comprises a signal generator adapted to generate a radio frequency test signal. a connector for inputting into the probe card the radio frequency test signal, and a detector assembly. The detector assembly comprises an RF chuck for receiving a radio frequency signal from the probe card, and a sensor configured to receive the radio frequency signal from the RF chuck. The sensor is configured to measure a magnitude of the radio frequency signal and to output a measurement signal that represents only the magnitude of the radio frequency signal. The RF chuck and the sensor are mechanically coupled.
Public/Granted literature
Information query