Invention Grant
US09579826B2 Method for slicing wafers from a workpiece using a sawing wire 有权
使用锯线从工件切片晶片的方法

  • Patent Title: Method for slicing wafers from a workpiece using a sawing wire
  • Patent Title (中): 使用锯线从工件切片晶片的方法
  • Application No.: US14669033
    Application Date: 2015-03-26
  • Publication No.: US09579826B2
    Publication Date: 2017-02-28
  • Inventor: Claudia Reinhardt
  • Applicant: Siltronic AG
  • Applicant Address: DE Munich
  • Assignee: SILTRONIC AG
  • Current Assignee: SILTRONIC AG
  • Current Assignee Address: DE Munich
  • Agency: Leydig, Voit & Mayer, Ltd.
  • Priority: DE102014206488 20140404; DE102015200198 20150109
  • Main IPC: B28D5/04
  • IPC: B28D5/04 B23D57/00
Method for slicing wafers from a workpiece using a sawing wire
Abstract:
A method for slicing wafers from a workpiece using a sawing wire, wherein at least two wire guide rolls clamp a wire web, each wire guide roll having a multiplicity of grooves in its lateral surface, wherein at least one groove in which no wire is inserted during the wire sawing is present alongside a wire-guiding groove and, after wear on the wire-guiding grooves or after a defined number of sawing processes, the sawing wire is wound over into the previously unoccupied grooves that are not yet worn or used, respectively.
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