Invention Grant
- Patent Title: Method for slicing wafers from a workpiece using a sawing wire
- Patent Title (中): 使用锯线从工件切片晶片的方法
-
Application No.: US14669033Application Date: 2015-03-26
-
Publication No.: US09579826B2Publication Date: 2017-02-28
- Inventor: Claudia Reinhardt
- Applicant: Siltronic AG
- Applicant Address: DE Munich
- Assignee: SILTRONIC AG
- Current Assignee: SILTRONIC AG
- Current Assignee Address: DE Munich
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: DE102014206488 20140404; DE102015200198 20150109
- Main IPC: B28D5/04
- IPC: B28D5/04 ; B23D57/00

Abstract:
A method for slicing wafers from a workpiece using a sawing wire, wherein at least two wire guide rolls clamp a wire web, each wire guide roll having a multiplicity of grooves in its lateral surface, wherein at least one groove in which no wire is inserted during the wire sawing is present alongside a wire-guiding groove and, after wear on the wire-guiding grooves or after a defined number of sawing processes, the sawing wire is wound over into the previously unoccupied grooves that are not yet worn or used, respectively.
Public/Granted literature
- US20150283727A1 METHOD FOR SLICING WAFERS FROM A WORKPIECE USING A SAWING WIRE Public/Granted day:2015-10-08
Information query