Invention Grant
- Patent Title: Imprint apparatus in which alignment control of a mold and a substrate is effected
- Patent Title (中): 对模具和基板进行对准控制的压印装置
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Application No.: US13804973Application Date: 2013-03-14
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Publication No.: US09579843B2Publication Date: 2017-02-28
- Inventor: Shingo Okushima , Nobuhito Suehira , Junichi Seki , Kazuyuki Kasumi
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2007-027168 20070206; JP2007-050545 20070228
- Main IPC: B29C59/02
- IPC: B29C59/02 ; B29C59/00 ; B82Y10/00 ; B82Y40/00 ; G03F7/00 ; G03F9/00

Abstract:
An imprint apparatus performs alignment control of a mold and a substrate. A pattern formed on the mold is transferred onto a pattern forming layer on the substrate. A mold holding portion holds the mold, a substrate holding portion holds the substrate, and a control portion effects control so that the mold and the substrate are brought near to each other during the alignment control. The mold and the pattern forming layer are brought into contact with each other and then the pattern forming layer is cured. The control portion changes a driving profile for the alignment control after the alignment control is started and at least one of before and after the mold contacts the pattern forming layer. The driving profile used to move at least one of the mold holding portion and the substrate holding portion to a target position, and includes at least one of acceleration, speed, driving voltage, and driving current.
Public/Granted literature
- US20130196016A1 IMPRINT APPARATUS IN WHICH ALIGNMENT CONTROL OF A MOLD AND A SUBSTRATE IS EFFECTED Public/Granted day:2013-08-01
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