Invention Grant
- Patent Title: MEMS device and method of making a MEMS device
- Patent Title (中): MEMS器件和制造MEMS器件的方法
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Application No.: US14971879Application Date: 2015-12-16
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Publication No.: US09580299B2Publication Date: 2017-02-28
- Inventor: Alfons Dehe , Martin Wurzer , Christian Herzum
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Main IPC: H04R19/04
- IPC: H04R19/04 ; B81B3/00 ; H04R19/00 ; B81C1/00 ; H04R7/06
Abstract:
A MEMS device and a method of making a MEMS device are disclosed. In one embodiment a semiconductor device comprises a substrate, a moveable electrode and a counter electrode, wherein the moveable electrode and the counter electrode are mechanically connected to the substrate. The movable electrode is configured to stiffen an inner region of the movable membrane.
Public/Granted literature
- US20160096726A1 MEMS Device and Method of Making a MEMS Device Public/Granted day:2016-04-07
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