Invention Grant
- Patent Title: Growth of large aluminum nitride single crystals with thermal-gradient control
- Patent Title (中): 通过热梯度控制生长大型氮化铝单晶
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Application No.: US14686812Application Date: 2015-04-15
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Publication No.: US09580833B2Publication Date: 2017-02-28
- Inventor: Robert T. Bondokov , Shailaja P. Rao , Shawn R. Gibb , Leo J. Schowalter
- Applicant: Robert T. Bondokov , Shailaja P. Rao , Shawn R. Gibb , Leo J. Schowalter
- Applicant Address: US NY Green Island
- Assignee: CRYSTAL IS, INC.
- Current Assignee: CRYSTAL IS, INC.
- Current Assignee Address: US NY Green Island
- Agency: Morgan, Lewis & Bockius LLP
- Main IPC: C30B23/06
- IPC: C30B23/06 ; C30B23/00 ; C30B29/40

Abstract:
In various embodiments, non-zero thermal gradients are formed within a growth chamber both substantially parallel and substantially perpendicular to the growth direction during formation of semiconductor crystals, where the ratio of the two thermal gradients (parallel to perpendicular) is less than 10, by, e.g., arrangement of thermal shields outside of the growth chamber.
Public/Granted literature
- US20150218728A1 GROWTH OF LARGE ALUMINUM NITRIDE SINGLE CRYSTALS WITH THERMAL-GRADIENT CONTROL Public/Granted day:2015-08-06
Information query
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