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US09580833B2 Growth of large aluminum nitride single crystals with thermal-gradient control 有权
通过热梯度控制生长大型氮化铝单晶

Growth of large aluminum nitride single crystals with thermal-gradient control
Abstract:
In various embodiments, non-zero thermal gradients are formed within a growth chamber both substantially parallel and substantially perpendicular to the growth direction during formation of semiconductor crystals, where the ratio of the two thermal gradients (parallel to perpendicular) is less than 10, by, e.g., arrangement of thermal shields outside of the growth chamber.
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