Invention Grant
US09581188B2 Mechanical connection forming a pivot for MEMS and NEMS mechanical structures
有权
机械连接形成用于MEMS和NEMS机械结构的枢轴
- Patent Title: Mechanical connection forming a pivot for MEMS and NEMS mechanical structures
- Patent Title (中): 机械连接形成用于MEMS和NEMS机械结构的枢轴
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Application No.: US14364348Application Date: 2012-12-12
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Publication No.: US09581188B2Publication Date: 2017-02-28
- Inventor: Guillaume Jourdan , Dirk Ettelt , Patrice Rey , Arnaud Walther
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT
- Applicant Address: FR Paris
- Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1161487 20111212
- International Application: PCT/EP2012/075278 WO 20121212
- International Announcement: WO2013/087717 WO 20130620
- Main IPC: F16C11/04
- IPC: F16C11/04 ; B81B3/00 ; G01P15/02
Abstract:
A mechanical connection between two parts of a microelectromechanical and/or nanoelectromechanical structure forming a pivot with an axis of rotation pivot includes two first beams with an axis parallel to the pivot axis, the first beams configured to work in torsion, and two second beams with an axis orthogonal to the axis of the first beams, the second beams configured to work in bending, each one of the first and second beams being connected at their ends to the two parts of the structure.
Public/Granted literature
- US20140331770A1 MECHANICAL CONNECTION FORMING A PIVOT FOR MEMS AND NEMS MECHANICAL STRUCTURES Public/Granted day:2014-11-13
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