Invention Grant
- Patent Title: Arrangement for cooling a plasma-based radiation source with a metal cooling liquid and method for starting up a cooling arrangement of this type
- Patent Title (中): 用金属冷却液冷却等离子体辐射源的装置以及启动这种冷却装置的方法
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Application No.: US14633420Application Date: 2015-02-27
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Publication No.: US09581392B2Publication Date: 2017-02-28
- Inventor: Gota Niimi , Dominik Marcel Vaudrevange , Ralf Gordon Conrads , Maghiel Jan Kole
- Applicant: USHIO Denki Kabushiki Kaisha
- Applicant Address: JP Tokyo-to
- Assignee: USHIO Denki Kabushiki Kaisha
- Current Assignee: USHIO Denki Kabushiki Kaisha
- Current Assignee Address: JP Tokyo-to
- Agency: Patentbar International, P.C.
- Priority: DE102014102720 20140228
- Main IPC: F28D15/00
- IPC: F28D15/00 ; F28F23/00 ; H05G2/00
Abstract:
An arrangement for cooling a plasma-based radiation source with a metal cooling liquid and a method for starting up a cooling arrangement of this type has a pump unit for conveying the metal cooling liquid from a reservoir to an immersion bath in a pipe portion that is connected to the reservoir in the conveying direction of the cooling circuit has at least one pump for conveying the metal cooling liquid through an external field effect of the at least one pump. A control unit for controlling the at least one pump controls the at least one pump at least temporarily in a pumping direction opposite to the conveying direction of the cooling circuit in order to generate a heating effect through external field effect on metal cooling liquid located in the pipe portion.
Public/Granted literature
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