Invention Grant
- Patent Title: Mechanical quantity measuring device
- Patent Title (中): 机械量测量装置
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Application No.: US14363138Application Date: 2011-12-06
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Publication No.: US09581427B2Publication Date: 2017-02-28
- Inventor: Kisho Ashida , Hiroyuki Ohta
- Applicant: Kisho Ashida , Hiroyuki Ohta
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- International Application: PCT/JP2011/078183 WO 20111206
- International Announcement: WO2013/084294 WO 20130613
- Main IPC: G01L1/18
- IPC: G01L1/18 ; G01B7/16

Abstract:
A mechanical quantity measuring device (semiconductor strain sensor) has a semiconductor chip including a plurality of piezoresistive elements formed on a front surface of a semiconductor substrate, a lead wire unit electrically connected to a plurality of electrodes of the semiconductor chip, and a plate member joined to a rear surface of the semiconductor chip. Further, the plate member includes a first region facing the rear surface of the semiconductor chip and a second region provided adjacent to the first region, and a thickness of the plate member in the first region is made larger than a thickness in the second region.
Public/Granted literature
- US20150027231A1 Mechanical Quantity Measuring Device Public/Granted day:2015-01-29
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