Invention Grant
- Patent Title: Diaphragm-type pressure gauge
- Patent Title (中): 隔膜式压力表
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Application No.: US14244469Application Date: 2014-04-03
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Publication No.: US09581513B2Publication Date: 2017-02-28
- Inventor: Haruzo Miyashita
- Applicant: CANON ANELVA CORPORATION
- Applicant Address: JP Kawasaki-Shi, Kanagawa-Ken
- Assignee: CANON ANELVA CORPORATION
- Current Assignee: CANON ANELVA CORPORATION
- Current Assignee Address: JP Kawasaki-Shi, Kanagawa-Ken
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: JP2011-220565 20111005; JP2012-085219 20120404
- Main IPC: G01L9/12
- IPC: G01L9/12 ; G01L9/00 ; G01L19/02

Abstract:
A diaphragm-type pressure gauge which is attached to a vessel to be measured and measures a pressure by introducing a gas inside the vessel includes a housing into which the gas is introduced, and a sensor unit which is arranged in the housing, and includes a diaphragm electrode, a measurement surface of which is arranged parallel to an introduction direction of the gas. When the housing is attached to the vessel, the measurement surface of the diaphragm electrode is arranged parallel to a direction of gravitational force.
Public/Granted literature
- US20140208860A1 DIAPHRAGM-TYPE PRESSURE GAUGE Public/Granted day:2014-07-31
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