Invention Grant
- Patent Title: High-output MEMS accelerometer
- Patent Title (中): 高输出MEMS加速度计
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Application No.: US14293992Application Date: 2014-06-02
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Publication No.: US09581614B2Publication Date: 2017-02-28
- Inventor: Tom Kwa
- Applicant: Meggitt (Orange County), Inc.
- Applicant Address: US CA Irvine
- Assignee: MEGGIT (ORANGE COUNTY), INC.
- Current Assignee: MEGGIT (ORANGE COUNTY), INC.
- Current Assignee Address: US CA Irvine
- Agency: Hackler Daghighian Martino & Novak
- Main IPC: G01P15/12
- IPC: G01P15/12 ; G01P15/09 ; B81B3/00 ; G01P15/08

Abstract:
A MEMS acceleration sensor is provided. In one embodiment, the MEMS acceleration sensor comprises: a frame; a first proofmass located within the frame, the first proofmass including a left side, right side, top, and bottom; an axis running from the left side to the right side at about a median point between the top and bottom; a first flexure running along the axis and coupling the left side to the frame; a second flexure running along the axis and coupling the right side to the frame; a first channel that extends from the bottom up past the axis to a first channel end; a second channel that extends from the top down past the axis to a second channel end; a second proofmass located within the first channel and coupled to the first proofmass via a first hinge and a first gauge at the first channel end and coupled to the frame at the bottom via a second hinge and a second gauge; and a third proofmass located within the second channel and coupled to the first proofmass via a third hinge and a third gauge at the second channel end and coupled to the frame at the top via a fourth hinge and a fourth gauge.
Public/Granted literature
- US20150346235A1 HIGH-OUTPUT MEMS ACCELEROMETER Public/Granted day:2015-12-03
Information query
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