Invention Grant
US09581614B2 High-output MEMS accelerometer 有权
高输出MEMS加速度计

High-output MEMS accelerometer
Abstract:
A MEMS acceleration sensor is provided. In one embodiment, the MEMS acceleration sensor comprises: a frame; a first proofmass located within the frame, the first proofmass including a left side, right side, top, and bottom; an axis running from the left side to the right side at about a median point between the top and bottom; a first flexure running along the axis and coupling the left side to the frame; a second flexure running along the axis and coupling the right side to the frame; a first channel that extends from the bottom up past the axis to a first channel end; a second channel that extends from the top down past the axis to a second channel end; a second proofmass located within the first channel and coupled to the first proofmass via a first hinge and a first gauge at the first channel end and coupled to the frame at the bottom via a second hinge and a second gauge; and a third proofmass located within the second channel and coupled to the first proofmass via a third hinge and a third gauge at the second channel end and coupled to the frame at the top via a fourth hinge and a fourth gauge.
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