Invention Grant
US09581799B2 Microscopic examination of an object using a sequence of optical microscopy and particle beam microscopy 有权
使用光学显微镜和粒子束显微镜序列对物体进行显微镜检查

Microscopic examination of an object using a sequence of optical microscopy and particle beam microscopy
Abstract:
For the microscopy of an object using a combination of optical microscopy and particle beam microscopy, a microscope slide system comprises an electrically conductive holder, wherein at least one window is configured in the holder, and wherein the holder has the dimensions of a standard glass microscope slide for the optical microscopy; a microscope slide element, which is designed to carry the object for the microscopy and which is designed such that the element can be placed over the window; and a fastening device, which is designed to fix the microscope slide element over the window. By means of said microscope slide system, the object can be analyzed using separate microscopes, without having to relocate the object.
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