Invention Grant
US09581799B2 Microscopic examination of an object using a sequence of optical microscopy and particle beam microscopy
有权
使用光学显微镜和粒子束显微镜序列对物体进行显微镜检查
- Patent Title: Microscopic examination of an object using a sequence of optical microscopy and particle beam microscopy
- Patent Title (中): 使用光学显微镜和粒子束显微镜序列对物体进行显微镜检查
-
Application No.: US13320208Application Date: 2010-05-07
-
Publication No.: US09581799B2Publication Date: 2017-02-28
- Inventor: Christian Thomas , Torsten Sievers , Alexander Thesen
- Applicant: Christian Thomas , Torsten Sievers , Alexander Thesen
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss AG
- Current Assignee: Carl Zeiss AG
- Current Assignee Address: DE Oberkochen
- Agency: Patteson Thuente Pedersen, P.A.
- Priority: DE102009020663 20090511
- International Application: PCT/EP2010/056228 WO 20100507
- International Announcement: WO2010/130639 WO 20101118
- Main IPC: G02B21/34
- IPC: G02B21/34 ; H01J37/20 ; H01J37/26

Abstract:
For the microscopy of an object using a combination of optical microscopy and particle beam microscopy, a microscope slide system comprises an electrically conductive holder, wherein at least one window is configured in the holder, and wherein the holder has the dimensions of a standard glass microscope slide for the optical microscopy; a microscope slide element, which is designed to carry the object for the microscopy and which is designed such that the element can be placed over the window; and a fastening device, which is designed to fix the microscope slide element over the window. By means of said microscope slide system, the object can be analyzed using separate microscopes, without having to relocate the object.
Public/Granted literature
- US20120133757A1 MICROSCOPIC EXAMINATION OF AN OBJECT USING A SEQUENCE OF OPTICAL MICROSCOPY AND PARTICLE BEAM MICROSCOPY Public/Granted day:2012-05-31
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B21/00 | 显微镜 |
G02B21/34 | .显微镜载物片,例如,在载物片上安装试样 |