Invention Grant
- Patent Title: Piezoelectric actuator and optical scanning apparatus having a plurality of piezoelectric layers
- Patent Title (中): 压电致动器和具有多个压电层的光学扫描装置
-
Application No.: US14032732Application Date: 2013-09-20
-
Publication No.: US09581810B2Publication Date: 2017-02-28
- Inventor: Hisanori Aga , Ayu Sugiyama
- Applicant: Hisanori Aga , Ayu Sugiyama
- Applicant Address: JP Tokyo
- Assignee: MITSUMI ELECTRIC CO., LTD.
- Current Assignee: MITSUMI ELECTRIC CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: IPUSA, PLLC
- Priority: JP2012-213500 20120927; JP2013-174661 20130826
- Main IPC: G02B26/10
- IPC: G02B26/10 ; H01L41/047 ; G02B26/08 ; H01L41/09
Abstract:
A piezoelectric actuator includes a plurality of piezoelectric layers, a plurality of electrodes between which each of the piezoelectric layers is placed so that the electrodes and the piezoelectric layers alternate with each other, and a substrate on which the plurality of piezoelectric layers and the plurality of electrodes are formed.
Public/Granted literature
- US20140085694A1 PIEZOELECTRIC ACTUATOR AND OPTICAL SCANNING APPARATUS HAVING A PLURALITY OF PIEZOELECTRIC LAYERS Public/Granted day:2014-03-27
Information query
