Invention Grant
- Patent Title: 2-dimensional patterning employing tone inverted graphoepitaxy
- Patent Title (中): 使用色调反转的图案糖蛋白的二维图案
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Application No.: US13686058Application Date: 2012-11-27
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Publication No.: US09581899B2Publication Date: 2017-02-28
- Inventor: Michael A. Guillorn , Kafai Lai , Jed W. Pitera , Hsinyu Tsai
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Louis J. Percello, Esq.
- Main IPC: G03F7/40
- IPC: G03F7/40 ; G03F7/00 ; H01L21/033 ; H01L21/311 ; B81C1/00 ; H01L21/768 ; B81B7/00 ; G03F7/16
Abstract:
After formation of a template layer over a neutral polymer layer, a self-assembling block copolymer material is applied and self-assembled. The template layer includes a first linear portion, a second linear portion that is shorter than the first linear portion, and blocking template structures having a greater width than the second linear portion. The self-assembling block copolymer material is phase-separated into alternating lamellae in regions away from the widthwise-extending portion. The blocking template structures perturb, and cause termination of, the lamellae. A cavity parallel to the first and second linear portions and terminating in self-alignment to the blocking template structures is formed upon selective removal of a polymeric block component. The pattern of the cavity can be inverted and transferred into the material layer to form fins having different lengths.
Public/Granted literature
- US20160358776A1 2-DIMENSIONAL PATTERNING EMPLOYING TONE INVERTED GRAPHOEPITAXY Public/Granted day:2016-12-08
Information query
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