Invention Grant
US09581939B2 Developing device and developing method 有权
开发设备和开发方法

Developing device and developing method
Abstract:
The present disclosure provides a developing device and method. The developing device includes the nozzle for spraying the developing liquid, the machine table for bearing the glass substrate, and the inclination controller for controlling the nozzle and the machine table to be inclined towards a predetermined direction of the machine table at a predetermined angle and keeping the inclined angle within a preset period. The method includes controlling, by the inclination controller, the machine table and the nozzle to be inclined towards a first direction of the machine table at a predetermined angle during the inclination cycle period and keeping the inclined angle within the preset period, and controlling, by the inclination controller, the machine table and the nozzle to be sequentially inclined towards other directions of the machine table at a predetermined angle according to the preset inclination direction sequence and keeping the inclined angle within the preset period.
Public/Granted literature
Information query
Patent Agency Ranking
0/0