Invention Grant
US09581996B2 Apparatus, method, and computer-readable medium for managing abnormality data measured in the substrate manufacturing process
有权
用于管理在基板制造工艺中测量的异常数据的装置，方法和计算机可读介质
- Patent Title: Apparatus, method, and computer-readable medium for managing abnormality data measured in the substrate manufacturing process
- Patent Title (中): 用于管理在基板制造工艺中测量的异常数据的装置，方法和计算机可读介质
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Application No.: US13433713Application Date: 2012-03-29
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Publication No.: US09581996B2Publication Date: 2017-02-28
- Inventor: Kazuhide Asai , Hideto Shimizu , Kayoko Yashiki
- Applicant: Kazuhide Asai , Hideto Shimizu , Kayoko Yashiki
- Applicant Address: JP Tokyo
- Assignee: HITACHI KOKUSAI ELECRIC INC.
- Current Assignee: HITACHI KOKUSAI ELECRIC INC.
- Current Assignee Address: JP Tokyo
- Agency: Volpe and Koenig, P.C.
- Priority: JP2011-81467 20110401
- Main IPC: G05B23/02
- IPC: G05B23/02
Abstract:
A management device includes a measurement data storage unit configured to store measurement data transmitted from a substrate processing apparatus; a setting unit configured to set an item of the measurement data as a determination target, reference data, and upper and lower limit values with respect to the reference data; a counting unit configured to count the number of times that the value of the measurement data corresponding to the item exceeds the upper and lower limit values; and a determining unit configured to determine that the measurement data as a determination target is abnormal, when the counted number exceeds a predetermined value.
Public/Granted literature
- US20120253724A1 MANAGEMENT DEVICE Public/Granted day:2012-10-04
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