Invention Grant
- Patent Title: Method for fabricating memory device
- Patent Title (中): 制造存储器件的方法
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Application No.: US14959974Application Date: 2015-12-04
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Publication No.: US09583495B2Publication Date: 2017-02-28
- Inventor: Kuang-Wen Liu
- Applicant: MACRONIX International Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX International Co., Ltd.
- Current Assignee: MACRONIX International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L27/105 ; H01L27/115 ; H01L21/762 ; H01L21/311 ; H01L21/768 ; H01L21/283 ; H01L27/02

Abstract:
Provided is a method for fabricating a memory device including forming a stack layer on a substrate, and embedding a plurality of gate pillar structures and a plurality of dielectric pillars in the stack layer. The plurality of gate pillar structures and the plurality of dielectric pillars extend along a same direction and are alternately arranged, so that the stack layer is divided into a plurality of stack structures.
Public/Granted literature
- US20160086953A1 METHOD FOR FABRICATING MEMORY DEVICE Public/Granted day:2016-03-24
Information query
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