Invention Grant
US09583495B2 Method for fabricating memory device 有权
制造存储器件的方法

Method for fabricating memory device
Abstract:
Provided is a method for fabricating a memory device including forming a stack layer on a substrate, and embedding a plurality of gate pillar structures and a plurality of dielectric pillars in the stack layer. The plurality of gate pillar structures and the plurality of dielectric pillars extend along a same direction and are alternately arranged, so that the stack layer is divided into a plurality of stack structures.
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