Invention Grant
- Patent Title: Method for manufacturing injection-enhanced insulated-gate bipolar transistor
- Patent Title (中): 制造注入增强绝缘栅双极晶体管的方法
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Application No.: US14902220Application Date: 2014-07-23
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Publication No.: US09583587B2Publication Date: 2017-02-28
- Inventor: Wanli Wang , Xiaoshe Deng , Genyi Wang , Xuan Huang
- Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.
- Applicant Address: CN Jiangsu
- Assignee: CSMC TECHNOLOGIES FABI CO., LTD.
- Current Assignee: CSMC TECHNOLOGIES FABI CO., LTD.
- Current Assignee Address: CN Jiangsu
- Agency: Polsinelli PC
- Priority: CN201310312223 20130723
- International Application: PCT/CN2014/082816 WO 20140723
- International Announcement: WO2015/010618 WO 20150129
- Main IPC: H01L21/33
- IPC: H01L21/33 ; H01L21/22 ; H01L21/38 ; H01L29/66 ; H01L29/739 ; H01L29/10 ; H01L29/06 ; H01L21/265 ; H01L21/266 ; H01L21/225 ; H01L21/324

Abstract:
A method for manufacturing an injection-enhanced insulated-gate bipolar transistor, comprising the following steps: an n-type substrate (12) is provided; a p-type doped layer (14) is formed on the n-type substrate (12); a hard layer (20) is formed on the p-type doped layer (14); a groove (40) extending to the n-type substrate (12) is formed by etching on the p-type doped layer (14); an n-type doped layer (50) is formed on the sidewalls and bottom of the groove (40); the hard layer (20) is removed; p-type impurities of the p-type doped layer (14) and n-type impurities of the n-type doped layer (50) are driven in together, where the p-type impurities are diffused to form a p-type base region (60), and the n-type impurities are diffused to form an n-type buffer layer (70); a gated oxide dielectric layer (80) is formed on the surface of the groove (40); and, a polysilicon layer (90) is deposited in the groove having formed therein the gate oxide dielectric layer (80). In the method for manufacturing the injection-enhanced insulated-gate bipolar transistor, the p-type doped layer (14) and the n-type doped layer (50) are driven in together to form the p-type base region (60) and the n-type buffer layer (70), as only one drive-in process is required, production cycle is shortened in comparison with a conventional method for manufacturing the injection-enhanced insulated-gate bipolar transistor.
Public/Granted literature
- US20160372573A1 METHOD FOR MANUFACTURING INJECTION-ENHANCED INSULATED-GATE BIPOLAR TRANSISTOR Public/Granted day:2016-12-22
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