Invention Grant
- Patent Title: RF impedance matching network
- Patent Title (中): 射频阻抗匹配网络
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Application No.: US15061068Application Date: 2016-03-04
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Publication No.: US09584090B2Publication Date: 2017-02-28
- Inventor: Anton Mavretic
- Applicant: Reno Technologies, Inc.
- Assignee: Reno Technologies, Inc.
- Current Assignee: Reno Technologies, Inc.
- Agency: The Belles Group, P.C.
- Main IPC: H03H7/40
- IPC: H03H7/40 ; H03H7/38 ; G01R27/26 ; G01R27/28 ; H01L21/3065 ; H01L21/311 ; H01L21/3213 ; H01L21/02 ; H01L21/285 ; H01L21/67 ; H01J37/32

Abstract:
An RF impedance matching network includes a transformation circuit coupled to an RF input and configured to provide a transformed impedance that is less than a fixed source impedance; a first shunt circuit in parallel to the RF input, the first shunt circuit including a first shunt variable component providing a first variable capacitance or inductance; and a first virtual ground coupled to the first shunt variable component and a ground; and a second shunt circuit in parallel to the RF input and, the second shunt circuit including a second shunt variable component providing a second variable capacitance or inductance; and a second virtual ground coupled to the second shunt variable component and the ground.
Public/Granted literature
- US20160248396A1 RF IMPEDANCE MATCHING NETWORK Public/Granted day:2016-08-25
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