Invention Grant
- Patent Title: Image sensors with voltage-biased trench isolation structures
- Patent Title (中): 具有电压偏置沟槽隔离结构的图像传感器
-
Application No.: US14747021Application Date: 2015-06-23
-
Publication No.: US09584744B2Publication Date: 2017-02-28
- Inventor: Victor Lenchenkov , Hamid Soleimani
- Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Applicant Address: US AZ Phoenix
- Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee Address: US AZ Phoenix
- Agency: Treyz Law Group, P.C.
- Agent Jason Tsai; Joseph F. Guihan
- Main IPC: H04N5/359
- IPC: H04N5/359 ; H04N5/225 ; H01L27/146

Abstract:
An image sensor with an array of image sensor pixels is provided. Each pixel may include a photodiode, a storage diode, and associated circuitry formed in a semiconductor substrate. Buried light shields may be formed on the substrate to prevent regions between two adjacent photodiodes from being exposed to incoming light. In one embodiment, a shallow trench isolation (STI) structure may be formed between the photodiode and the storage diode, and a conductive layer formed from optically absorptive material may be constructed at the bottom of the STI structure. A via may be formed through the STI structure to help bias the conductive layer using a ground or negative voltage. In another embodiment, an isolation ring structure may be formed at the base of the buried light shields. The isolation ring structure may be formed from optically absorptive material and can optionally be biased using a ground or negative voltage.
Public/Granted literature
- US20160381310A1 IMAGE SENSORS WITH VOLTAGE-BIASED TRENCH ISOLATION STRUCTURES Public/Granted day:2016-12-29
Information query