Invention Grant
US09586979B2 Amino-silyl amine compound, method for preparing the same and silicon-containing thin-film using the same 有权
氨基甲硅烷基胺化合物,其制备方法和使用其的含硅薄膜

Amino-silyl amine compound, method for preparing the same and silicon-containing thin-film using the same
Abstract:
Provided are a novel amino-silyl amine compound, a method for preparing the same, and a silicon-containing thin-film using the same, wherein the amino-silyl amine compound has thermal stability and high volatility and is maintained in a liquid state at room temperature and under a pressure where handling is easy to thereby form a silicon-containing thin-film having high purity and excellent physical and electrical properties by various deposition methods.
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