Invention Grant
- Patent Title: Amino-silyl amine compound, method for preparing the same and silicon-containing thin-film using the same
- Patent Title (中): 氨基甲硅烷基胺化合物,其制备方法和使用其的含硅薄膜
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Application No.: US14896156Application Date: 2014-06-05
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Publication No.: US09586979B2Publication Date: 2017-03-07
- Inventor: Se Jin Jang , Sang-Do Lee , Sung Gi Kim , Byeong-il Yang , Jang Hyeon Seok , Sang Ick Lee , Myong Woon Kim
- Applicant: DNF CO., LTD.
- Applicant Address: KR Daejeon
- Assignee: DNF CO., LTD.
- Current Assignee: DNF CO., LTD.
- Current Assignee Address: KR Daejeon
- Agency: Hauptman Ham, LLP
- Priority: KR10-2013-0065399 20130607; KR10-2013-0159399 20131219
- International Application: PCT/KR2014/005006 WO 20140605
- International Announcement: WO2014/196827 WO 20141211
- Main IPC: C07F7/02
- IPC: C07F7/02 ; C07F7/10

Abstract:
Provided are a novel amino-silyl amine compound, a method for preparing the same, and a silicon-containing thin-film using the same, wherein the amino-silyl amine compound has thermal stability and high volatility and is maintained in a liquid state at room temperature and under a pressure where handling is easy to thereby form a silicon-containing thin-film having high purity and excellent physical and electrical properties by various deposition methods.
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