Invention Grant
- Patent Title: Apparatus for processing a melt
- Patent Title (中): 用于加工熔体的设备
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Application No.: US14275770Application Date: 2014-05-12
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Publication No.: US09587324B2Publication Date: 2017-03-07
- Inventor: Frederick M. Carlson , Peter L. Kellerman , David Morrell , Brian Mackintosh , Nandish Desai
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: C30B11/14
- IPC: C30B11/14 ; C30B15/06 ; F27B14/06 ; F27B14/14 ; C30B15/10 ; C30B15/14 ; C30B29/06 ; C30B29/64 ; F27B3/02 ; F27B3/10 ; F27D99/00

Abstract:
An apparatus for processing a melt may include a crucible configured to contain the melt, where the melt has an exposed surface that is separated from a floor of the crucible by a first distance. The apparatus may further include a submerged heater comprising a heating element and a shell disposed between the heating element and the melt, wherein the heating element does not contact the melt. The heating element may be disposed at a second distance with respect to the exposed surface of the melt that is less than the first distance.
Public/Granted literature
- US20150322590A1 APPARATUS FOR PROCESSING A MELT Public/Granted day:2015-11-12
Information query
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