Invention Grant
- Patent Title: High speed high resolution heterodyne interferometric method and system
- Patent Title (中): 高速高分辨率外差干涉法和系统
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Application No.: US14378880Application Date: 2012-11-08
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Publication No.: US09587927B2Publication Date: 2017-03-07
- Inventor: Jiubin Tan , Pengcheng Hu , Xiaofei Diao
- Applicant: HARBIN INSTITUTE OF TECHNOLOGY
- Applicant Address: CN Nangang District, Harbin, Heilongjiang
- Assignee: HARBIN INSTITUTE OF TECHNOLOGY
- Current Assignee: HARBIN INSTITUTE OF TECHNOLOGY
- Current Assignee Address: CN Nangang District, Harbin, Heilongjiang
- Agency: Global IP Services
- Agent Tianhua Gu
- Priority: CN201210347063 20120919
- International Application: PCT/CN2012/084266 WO 20121108
- International Announcement: WO2014/043984 WO 20140327
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01J9/04 ; G01B11/14 ; G02B27/28

Abstract:
A high speed high resolution heterodyne interferometric method and system are provided. The invention uses two spatially separated beams with slightly different frequencies and has two measurement signals with opposite Doppler shift. The switching circuit selects one of the two measurement signals for displacement measurement according to the direction and speed of the target movement. In this invention, the measurement is insensitive to the thermal variation; the periodic nonlinearity is essentially eliminated by using two spatially separated beams; the measurable target speed of the interferometer is no longer limited by the beat frequency of the laser source.
Public/Granted literature
- US20150043004A1 HIGH SPEED HIGH RESOLUTION HETERODYNE INTERFEROMETRIC METHOD AND SYSTEM Public/Granted day:2015-02-12
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