Invention Grant
- Patent Title: Angular velocity sensor, electronic apparatus, and moving object
- Patent Title (中): 角速度传感器，电子设备和移动物体
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Application No.: US14528496Application Date: 2014-10-30
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Publication No.: US09587944B2Publication Date: 2017-03-07
- Inventor: Ryuta Nishizawa , Keiji Nakagawa , Norifumi Shimizu
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2013-226532 20131031
- Main IPC: G01C19/00
- IPC: G01C19/00 ; G01C19/5614 ; G01C19/5607 ; G01P3/02
Abstract:
An angular velocity sensor includes fixing units, a base portion, beam portions that support the base portion with respect to the fixing units, driving vibrating arms connected to the base portion, and detection vibrating arms connected to the base portion. When a width of a detection frequency band is set to f1 [Hz], a resonance frequency in a rotational vibration mode in which the base portion rotates and vibrates around a detection axis with respect to the fixing units in association with the deformation of the beam portions is set to f2 [Hz], and a detuning frequency is set to f3 [Hz], the relation of f1
Public/Granted literature
- US20150114114A1 ANGULAR VELOCITY SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT Public/Granted day:2015-04-30
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