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US09588056B2 Method for particle detection on flexible substrates 有权
柔性基板上颗粒检测方法

Method for particle detection on flexible substrates
Abstract:
Methods for detection of particulate on thin, flexible substrates wherein the substrate is positioned in a bend comprising an apex line. The apex line is illuminated by grazing angle illumination, and light from the illumination scattered by the particulate is captured by a detection apparatus.
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