Invention Grant
- Patent Title: Resistive MEMS humidity sensor
- Patent Title (中): 电阻式MEMS湿度传感器
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Application No.: US14108198Application Date: 2013-12-16
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Publication No.: US09588073B2Publication Date: 2017-03-07
- Inventor: Ando Feyh , Andrew Graham , Ashwin Samarao , Gary Yama , Gary O'Brien
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot Moore & Beck LLP
- Main IPC: G01N27/12
- IPC: G01N27/12

Abstract:
A semiconductor device includes a substrate, an insulating film provided on a surface of the substrate, and a sensing film formed of a conductive material deposited on top of the insulating film. The sensing film defines at least one conductive path between a first position and a second position on the insulating film. A first circuit connection is electrically connected to the sensing film at the first position on the insulating layer, and a second circuit connection is electrically connected to the sensing film at the second position. A control circuit is operatively connected to the first circuit connection and the second circuit connection for measuring an electrical resistance of the sensing film. The sensing film has a thickness that enables a resistivity of the sensing film to be altered predictably in a manner that is dependent on ambient moisture content.
Public/Granted literature
- US20140167791A1 Resistive MEMS Humidity Sensor Public/Granted day:2014-06-19
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