Invention Grant
- Patent Title: Fabry-perot interferometer and a method for producing the same with decreased bending
- Patent Title (中): 法布里 - 珀罗干涉仪及其弯曲减小的方法
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Application No.: US14399956Application Date: 2013-05-08
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Publication No.: US09588334B2Publication Date: 2017-03-07
- Inventor: Tapani Antila , Jussi Mäkynen , Christer Holmlund , Jarkko Antila , Jyrki Ollila , Heikki Saari
- Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
- Applicant Address: FI Espoo
- Assignee: TEKNLOGIAN TUTKIMUSKESKUS VTT OY
- Current Assignee: TEKNLOGIAN TUTKIMUSKESKUS VTT OY
- Current Assignee Address: FI Espoo
- Agent Mark M. Friedman
- Priority: FI20125495 20120508
- International Application: PCT/FI2013/050510 WO 20130508
- International Announcement: WO2013/167811 WO 20131114
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G01J3/26 ; G01B9/02

Abstract:
The invention relates to a Fabry-Perot interferometer and a method for producing the same. More specifically, the invention relates to Fabry-Perot interferometers which are controllable with one or several actuators, such as piezoelectric, electrostrictive or flexoelectric actuators. In prior art technology there is a problem to achieve a sufficiently small and uniform gap between mirrors. In the present invention an intermediate structure (85a, 85b, 95a, 95b, 81a, 81b, 91a, 91b, 98a, 98b) is used between a mirror and an actuator or between two mirrors. The method of production also includes measuring the width distribution of the gap in several phases, and providing pre-actuation of actuators.
Public/Granted literature
- US20150124263A1 Fabry-Perot interferometer and a method for producing the same Public/Granted day:2015-05-07
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