A semiconductor device includes a plurality of memory blocks each including a plurality of memory cells, a circuit group performing a program operation, a read operation and an erase operation on a selected memory block, among the plurality of memory blocks, and a control circuit controlling the circuit group to program the memory cells of the selected memory block in a healing pattern. The healing pattern is programmed before a subsequent program operation is performed on the selected memory block. The memory cells of the healing pattern include erased memory cells and programmed memory cells arranged alternately.