Invention Grant
- Patent Title: Method and apparatus for producing a reflection-reducing layer on a substrate
- Patent Title (中): 在基板上制造反射减少层的方法和装置
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Application No.: US14348417Application Date: 2012-09-28
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Publication No.: US09589768B2Publication Date: 2017-03-07
- Inventor: Michael Scherer , Jurgen Pistner , Harro Hagedorn , Michael Klosch-Trageser
- Applicant: Leybold Optics GmbH
- Applicant Address: DE Alzenau
- Assignee: Leybold Optics GmbH
- Current Assignee: Leybold Optics GmbH
- Current Assignee Address: DE Alzenau
- Agency: Mintz Levin Cohn Ferris Glovsky and Popeo, P.C.
- Priority: DE102011114450 20110928
- International Application: PCT/EP2012/004093 WO 20120928
- International Announcement: WO2013/045111 WO 20130404
- Main IPC: C23F1/00
- IPC: C23F1/00 ; H01J37/32 ; C23C14/00 ; C23C14/02 ; C23C14/50 ; C23C14/52 ; C23C14/56 ; H01J37/34 ; C23C14/34 ; C23C14/58

Abstract:
The invention relates to an apparatus (1) for producing a reflection-reducing layer on a surface (21) of a plastics substrate (20). The apparatus comprises a first sputtering device (3) for applying a base layer (22) to the surface (21) of the plastics substrate (20), a plasma source (4) for plasma-etching the coated substrate surface (21), and a second sputtering device (5) for applying a protective layer (24) to the substrate surface (21). These processing devices (3, 4, 5) are arranged jointly in a vacuum chamber (2), which has inlets (8) for processing gases. In order to move the substrate (20) between the processing devices (3, 4, 5) in the interior of the vacuum chamber (2), a conveying apparatus (10) is provided which is preferably in the form of a rotary table (11). Furthermore, the invention relates to a method for producing such a reflection-reducing layer on the surface (21) of the plastics substrate (20).
Public/Granted literature
- US20140329095A1 Method and Apparatus for Producing a Reflection-Reducing Layer on a Substrate Public/Granted day:2014-11-06
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