Invention Grant
- Patent Title: Stage unit and laser annealing apparatus including the same
- Patent Title (中): 舞台单元和包括其的激光退火设备
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Application No.: US13962875Application Date: 2013-08-08
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Publication No.: US09589813B2Publication Date: 2017-03-07
- Inventor: Hiroyuki Fujita
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: KR10-2013-0009701 20130129
- Main IPC: B23K26/00
- IPC: B23K26/00 ; H01L21/324 ; H01L21/677 ; H01L21/68
Abstract:
A stage unit may include a frame, a first guide device, a stage, a second guide device and a pad. The first guide device may be arranged over an upper surface of the frame and configured to guide the stage in a first direction. The stage may be movably connected to the first guide device. The second guide device may be arranged over an upper surface of the stage and configured to guide the pad in a second direction substantially perpendicular to the first direction. The pad may be movably connected to the second guide device and configured to support a substrate. Therefore, the substrate may be supported by and uniformly floated by the frame, the stage and the pad.
Public/Granted literature
- US20140209578A1 STAGE UNIT AND LASER ANNEALING APPARATUS INCLUDING THE SAME Public/Granted day:2014-07-31
Information query
