Invention Grant
- Patent Title: Semiconductor wafers including indications of crystal orientation and methods of forming the same
- Patent Title (中): 包括晶体取向的指示的半导体晶片及其形成方法
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Application No.: US14519788Application Date: 2014-10-21
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Publication No.: US09589901B2Publication Date: 2017-03-07
- Inventor: Tae-Hyoung Koo , Samjong Choi , Dongjun Lee , Yongsun Ko
- Applicant: Tae-Hyoung Koo , Samjong Choi , Dongjun Lee , Yongsun Ko
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Ward and Smith, P.A.
- Priority: KR10-2014-0015631 20140211
- Main IPC: H01L23/544
- IPC: H01L23/544
Abstract:
A wafer can be provided to include a single crystalline semiconductor material with a predetermined crystal orientation. The wafer can include a laser mark at a determined position on a front surface or on a back surface of the wafer, where the determined position is configured to indicate the predetermined crystal orientation of the single crystalline semiconductor material.
Public/Granted literature
- US20150228588A1 Semiconductor Wafers Including Indications of Crystal Orientation and Methods of Forming the Same Public/Granted day:2015-08-13
Information query
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