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US09591408B2 Adjustable ventilation openings in MEMS structures 有权
MEMS结构中可调整的通风口

Adjustable ventilation openings in MEMS structures
Abstract:
A MEMS structure and a method for operation a MEMS structure are disclosed. In accordance with an embodiment of the present invention, a MEMS structure comprises a substrate, a backplate, and a membrane comprising a first region and a second region, wherein the first region is configured to sense a signal and the second region is configured to adjust a threshold frequency from a first value to a second value, and wherein the backplate and the membrane are mechanically connected to the substrate.
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