Invention Grant
- Patent Title: Adjustable ventilation openings in MEMS structures
- Patent Title (中): MEMS结构中可调整的通风口
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Application No.: US14553718Application Date: 2014-11-25
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Publication No.: US09591408B2Publication Date: 2017-03-07
- Inventor: Alfons Dehe , Martin Wurzer
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Main IPC: H04R19/04
- IPC: H04R19/04 ; H04R1/22 ; H04R7/26 ; B81B3/00 ; H04R19/00

Abstract:
A MEMS structure and a method for operation a MEMS structure are disclosed. In accordance with an embodiment of the present invention, a MEMS structure comprises a substrate, a backplate, and a membrane comprising a first region and a second region, wherein the first region is configured to sense a signal and the second region is configured to adjust a threshold frequency from a first value to a second value, and wherein the backplate and the membrane are mechanically connected to the substrate.
Public/Granted literature
- US20150078587A1 Adjustable Ventilation Openings in MEMS Structures Public/Granted day:2015-03-19
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