Invention Grant
- Patent Title: Ultrasonic transducer device, probe, electronic instrument, and ultrasonic diagnostic device
- Patent Title (中): 超声波换能器,探头,电子仪器和超声波诊断装置
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Application No.: US14227558Application Date: 2014-03-27
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Publication No.: US09592031B2Publication Date: 2017-03-14
- Inventor: Kanechika Kiyose , Hironori Suzuki , Hiroshi Matsuda
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Global IP Counselors, LLP
- Priority: JP2013-071582 20130329
- Main IPC: A61B8/00
- IPC: A61B8/00 ; B06B1/06 ; A61B8/08 ; H01L41/08 ; H01L41/047 ; H01L27/20 ; H01L41/332

Abstract:
An ultrasonic transducer device includes a base, a first electrode film, a piezoelectric film, a second electrode film and a first conductive film. The base has a plurality of vibrating film portions arranged in an array pattern. The first electrode film is disposed on each of the vibrating film portions. The piezoelectric film is disposed on the first electrode film. The second electrode film is disposed on the piezoelectric film. The first conductive film is connected to the first electrode film. The first conductive film has a film thickness larger than a film thickness of the first electrode film.
Public/Granted literature
- US20140296716A1 ULTRASONIC TRANSDUCER DEVICE, PROBE, ELECTRONIC INSTRUMENT, AND ULTRASONIC DIAGNOSTIC DEVICE Public/Granted day:2014-10-02
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