Invention Grant
US09592031B2 Ultrasonic transducer device, probe, electronic instrument, and ultrasonic diagnostic device 有权
超声波换能器,探头,电子仪器和超声波诊断装置

Ultrasonic transducer device, probe, electronic instrument, and ultrasonic diagnostic device
Abstract:
An ultrasonic transducer device includes a base, a first electrode film, a piezoelectric film, a second electrode film and a first conductive film. The base has a plurality of vibrating film portions arranged in an array pattern. The first electrode film is disposed on each of the vibrating film portions. The piezoelectric film is disposed on the first electrode film. The second electrode film is disposed on the piezoelectric film. The first conductive film is connected to the first electrode film. The first conductive film has a film thickness larger than a film thickness of the first electrode film.
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