Invention Grant
US09592534B2 Ultrasonic transducer element chip, probe, electronic instrument, and ultrasonic diagnostic device 有权
超声波换能器元件芯片,探头,电子仪器和超声波诊断装置

Ultrasonic transducer element chip, probe, electronic instrument, and ultrasonic diagnostic device
Abstract:
An ultrasonic transducer element chip includes a substrate, a plurality of ultrasonic transducer elements and a plate-shaped member. The substrate includes a partition wall section defining a plurality of openings arranged in an array pattern. A wall thickness of the partition wall section is smaller than a wall height of partition wall section. Each of the ultrasonic transducer elements is provided in each of the openings. The plate-shaped member is fixed on a surface of the substrate opposite to a surface of the substrate on which the ultrasonic transducer elements are provided. The plate-shaped member covers at least one of the openings in a plan view seen along a thickness direction of the substrate.
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