Invention Grant
- Patent Title: Damping arrangement for dissipating oscillating energy of an element in a system, more particularly in a microlithographic projection exposure apparatus
- Patent Title (中): 用于耗散系统中的元件的振荡能量的阻尼装置,更具体地在微光刻投影曝光装置中
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Application No.: US14144101Application Date: 2013-12-30
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Publication No.: US09593733B2Publication Date: 2017-03-14
- Inventor: Markus Hauf
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102011080318 20110803
- Main IPC: F16F15/03
- IPC: F16F15/03 ; F16F7/10 ; G03F7/20

Abstract:
The invention relates to a damping arrangement for dissipating oscillation energy of an element in a system, more particularly in a microlithographic projection exposure apparatus, comprising an absorber mass, which is mounted via a stable mounting with respect to the element, wherein the absorber mass is arranged in a cavity present within the element and is at least partly surrounded by a fluid situated in the cavity, wherein a mass-spring system is formed by the absorber mass, the system damping a translational movement component of an oscillation of the element that exists at the linking point of the absorber mass, and wherein the stable mounting is formed by a rheological fluid that is electrically controllable or controllable via electric or magnetic fields.
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