Invention Grant
US09593733B2 Damping arrangement for dissipating oscillating energy of an element in a system, more particularly in a microlithographic projection exposure apparatus 有权
用于耗散系统中的元件的振荡能量的阻尼装置,更具体地在微光刻投影曝光装置中

  • Patent Title: Damping arrangement for dissipating oscillating energy of an element in a system, more particularly in a microlithographic projection exposure apparatus
  • Patent Title (中): 用于耗散系统中的元件的振荡能量的阻尼装置,更具体地在微光刻投影曝光装置中
  • Application No.: US14144101
    Application Date: 2013-12-30
  • Publication No.: US09593733B2
    Publication Date: 2017-03-14
  • Inventor: Markus Hauf
  • Applicant: Carl Zeiss SMT GmbH
  • Applicant Address: DE Oberkochen
  • Assignee: Carl Zeiss SMT GmbH
  • Current Assignee: Carl Zeiss SMT GmbH
  • Current Assignee Address: DE Oberkochen
  • Agency: Fish & Richardson P.C.
  • Priority: DE102011080318 20110803
  • Main IPC: F16F15/03
  • IPC: F16F15/03 F16F7/10 G03F7/20
Damping arrangement for dissipating oscillating energy of an element in a system, more particularly in a microlithographic projection exposure apparatus
Abstract:
The invention relates to a damping arrangement for dissipating oscillation energy of an element in a system, more particularly in a microlithographic projection exposure apparatus, comprising an absorber mass, which is mounted via a stable mounting with respect to the element, wherein the absorber mass is arranged in a cavity present within the element and is at least partly surrounded by a fluid situated in the cavity, wherein a mass-spring system is formed by the absorber mass, the system damping a translational movement component of an oscillation of the element that exists at the linking point of the absorber mass, and wherein the stable mounting is formed by a rheological fluid that is electrically controllable or controllable via electric or magnetic fields.
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