Invention Grant
- Patent Title: Package for a differential pressure sensing die
- Patent Title (中): 压差传感管芯的封装
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Application No.: US14194030Application Date: 2014-02-28
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Publication No.: US09593995B2Publication Date: 2017-03-14
- Inventor: David E. Wagner , John J. Valentini
- Applicant: Measurement Specialties, Inc.
- Applicant Address: US VA Hampton
- Assignee: Measurement Specialties, Inc.
- Current Assignee: Measurement Specialties, Inc.
- Current Assignee Address: US VA Hampton
- Agency: Howard IP Law Group, P.C.
- Main IPC: G01L19/14
- IPC: G01L19/14 ; G01L19/00 ; G01L13/02 ; G01L9/00 ; G01L19/06

Abstract:
A differential pressure sensor includes a pressure sensing die comprising a semiconductor die, having a thinned portion forming a diaphragm. The diaphragm includes piezo-resistive elements that exhibit varying resistance based on force exerted on the diaphragm. A first support structure is bonded to a first surface of the semiconductor die, having an aperture defined through the support structure such that a first surface of the diaphragm is exposed through the aperture. A second support structure is bonded to the opposite side of the semiconductor die having an aperture aligned with the opposing side of the diaphragm. Electrical components in electrical communication with the piezo-resistive elements are arranged outside the region defined by the bond between the first and second support structures and the semiconductor die. An oil-filled volume may be defined between the semiconductor die and a harsh medium which transmits a fluid pressure to the die without the harsh medium contacting the die.
Public/Granted literature
- US20150247776A1 PACKAGE FOR A DIFFERENTIAL PRESSURE SENSING DIE Public/Granted day:2015-09-03
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