Invention Grant
US09594024B2 Method for correcting a signal backscattered by a sample and associated device
有权
用于校正由样品和相关装置反向散射的信号的方法
- Patent Title: Method for correcting a signal backscattered by a sample and associated device
- Patent Title (中): 用于校正由样品和相关装置反向散射的信号的方法
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Application No.: US15015325Application Date: 2016-02-04
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Publication No.: US09594024B2Publication Date: 2017-03-14
- Inventor: Blandine Roig , Anne Koenig , Jean-Marc Dinten , Francois Perraut
- Applicant: Commissariat a L'Energie Atomique et aux Energies Alternatives
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1550983 20150206
- Main IPC: G01J3/44
- IPC: G01J3/44 ; G01N21/65 ; G01N21/64 ; G01N21/49 ; G01N21/27 ; G02B21/00

Abstract:
The invention relates to a method for correcting an optical signal produced by a sample comprising the following steps: illuminating a surface of the sample by a first light beam, produced by a first light source, the said first light source being coupled to a first optical system, focusing the said first light beam in an object focal plane of the first optical system, the said object focal plane being situated, in the sample, at a measuring depth z from the surface of the sample; measuring, with a first photodetector, of a first optical signal backscattered by the sample in response to the first light beam, the first photodetector producing a first measured signal representative of the said first optical signal, a spatial filter being interposed between the first optical system and the first photodetector, the spatial filter comprising a window which transmits the said first optical signal towards the said first photodetector, the window being disposed in a conjugate focal plane of the object focal plane of the first optical system; wherein the method also comprises the following steps: determining an optical scattering property of the sample; applying a correction function to the first measured signal so as to generate a first corrected signal, the said correction function taking into account the said optical scattering property.
Public/Granted literature
- US20160231249A1 METHOD FOR CORRECTING A SIGNAL BACKSCATTERED BY A SAMPLE AND ASSOCIATED DEVICE Public/Granted day:2016-08-11
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