Invention Grant
- Patent Title: Apparatus for measuring the local electrical resistance of a surface
- Patent Title (中): 用于测量表面局部电阻的装置
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Application No.: US13696125Application Date: 2011-05-03
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Publication No.: US09594101B2Publication Date: 2017-03-14
- Inventor: Olivier Schneegans , Pascal Chretien , Frédéric Houzé
- Applicant: Olivier Schneegans , Pascal Chretien , Frédéric Houzé
- Applicant Address: FR Paris FR Gif-sur-Yvette
- Assignee: Centre National De La Recherche Scientifique,Ecole Superieure D'Electricite
- Current Assignee: Centre National De La Recherche Scientifique,Ecole Superieure D'Electricite
- Current Assignee Address: FR Paris FR Gif-sur-Yvette
- Agency: Alston & Bird LLP
- Priority: FR1001940 20100505
- International Application: PCT/IB2011/051951 WO 20110503
- International Announcement: WO2011/138738 WO 20111110
- Main IPC: G01R27/02
- IPC: G01R27/02 ; B82Y35/00 ; G01Q60/30

Abstract:
Apparatus for measuring the local electrical resistance of a surface, the apparatus comprising: a DC voltage source for applying a bias voltage (Vpol) to the sample (E) for characterizing; a measurement circuit (CM) capable of being connected to a conductive probe suitable for coming into contact with a surface (SE) of said sample in order to generate a signal (S) representative of a contact resistance between said conductive probe and said surface of the sample; and a control device (CMD) for controlling said measurement circuit; the apparatus being characterized in that said measurement circuit comprises: a measurement resistive two-terminal network (DM) presenting variable resistance and connected between said conductive probe and a ground of the circuit; and a calculation unit (UC) for generating said signal representative of a contact resistance between said conductive probe and said surface of the sample as a function of a voltage (Vs) across the terminals of said measurement resistive two-terminal network.
Public/Granted literature
- US20130103335A1 Apparatus for Measuring the Local Electrical Resistance of a Surface Public/Granted day:2013-04-25
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