Invention Grant
- Patent Title: Capacitive detection type electro-mechanical transducer
- Patent Title (中): 电容式检测型机电换能器
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Application No.: US14296351Application Date: 2014-06-04
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Publication No.: US09594103B2Publication Date: 2017-03-14
- Inventor: Atsushi Kandori , Makoto Takagi , Masao Majima
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2010-003649 20100112
- Main IPC: G01R27/26
- IPC: G01R27/26 ; B06B1/02 ; B81C1/00 ; G01N29/24 ; G01D5/24

Abstract:
A capacitive detection type electro-mechanical transducer comprises; a cell formed by a first electrode arranged on a substrate and a second electrode arranged on a vibration film, and a detection circuit for detecting a displacement of the vibration film, based on a capacity change between the first and second electrodes, wherein a plurality of the cells are classified into a plurality of groups, each one includes at least two cells, and the first electrodes or the second electrodes of the cells of the same one group are commonly connected to the same one detection circuit, and an addition circuit for adding, into single information, signals from the plurality of detection circuits corresponding to the plurality of groups, and for outputting the information, and a capacitive load for each one of the detectors are formulated to be dispersedly arranged.
Public/Granted literature
- US20140285219A1 CAPACITIVE DETECTION TYPE ELECTRO-MECHANICAL TRANSDUCER Public/Granted day:2014-09-25
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