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US09594128B2 Two axes MEMS resonant magnetometer 有权
两轴MEMS谐振磁力仪

Two axes MEMS resonant magnetometer
Abstract:
A two-axes MEMS magnetometer includes, in one plane, a freestanding rectangular frame having inner walls and four torsion springs, wherein opposing inner walls of the frame are contacted by one end of only two torsion springs, each torsion spring being anchored by its other end, towards the center of the frame, to a substrate. In operation, the magnetometer measures the magnetic field in two orthogonal sensing modes using differential capacitance measurements.
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