Invention Grant
- Patent Title: Two axes MEMS resonant magnetometer
- Patent Title (中): 两轴MEMS谐振磁力仪
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Application No.: US14228090Application Date: 2014-03-27
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Publication No.: US09594128B2Publication Date: 2017-03-14
- Inventor: Mahmoud A. Farghaly , Veronique Rochus , Xavier Rottenberg , Hendrikus Tilmans
- Applicant: IMEC , King Abdulaziz City for Science and Technology
- Applicant Address: SA Riyadh BE Leuven
- Assignee: King Abulaziz City for Science and Technology,IMEC
- Current Assignee: King Abulaziz City for Science and Technology,IMEC
- Current Assignee Address: SA Riyadh BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP13161353 20130327
- Main IPC: G01R33/02
- IPC: G01R33/02 ; G01R33/028 ; G01R15/24 ; G01R33/00 ; G06F17/50 ; G01V3/08 ; G01V3/40

Abstract:
A two-axes MEMS magnetometer includes, in one plane, a freestanding rectangular frame having inner walls and four torsion springs, wherein opposing inner walls of the frame are contacted by one end of only two torsion springs, each torsion spring being anchored by its other end, towards the center of the frame, to a substrate. In operation, the magnetometer measures the magnetic field in two orthogonal sensing modes using differential capacitance measurements.
Public/Granted literature
- US20140292323A1 Two Axes MEMS Resonant Magnetometer Public/Granted day:2014-10-02
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