Invention Grant
- Patent Title: Spectral apparatus, detection apparatus, light source apparatus, reaction apparatus, and measurement apparatus
- Patent Title (中): 光谱仪,检测装置,光源装置,反应装置及测定装置
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Application No.: US14294480Application Date: 2014-06-03
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Publication No.: US09594253B2Publication Date: 2017-03-14
- Inventor: Takashi Sukegawa , Yohei Kobayashi , Akira Ozawa , Mamoru Endo , Makoto Gonokami
- Applicant: CANON KABUSHIKI KAISHA , The University of Tokyo
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA,The University of Tokyo
- Current Assignee: CANON KABUSHIKI KAISHA,The University of Tokyo
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2013-120520 20130607
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G02B27/10 ; G01J3/28 ; G01J3/18 ; G01N21/75 ; G02B5/18 ; G01J3/02 ; G01J1/04 ; G01J3/22

Abstract:
The present invention provides a spectral apparatus for spectrally separating light including a predetermined wavelength, including a slit that the light enters, a first optical system configured to collimate the light from the slit, a transmissive type diffraction element configured to diffract the light from the first optical system, and a second optical system including a first mirror configured to reflect the light diffracted by the transmissive type diffraction element, and a second mirror configured to reflect the light reflected by the first mirror and diffracted by the transmissive type diffraction element, and configured to make the light reciprocally travel between the first mirror and the second mirror via the transmissive type diffraction element.
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