Invention Grant
US09594862B2 Method of fabricating an integrated circuit with non-printable dummy features 有权
制造具有不可打印虚拟特征的集成电路的方法

Method of fabricating an integrated circuit with non-printable dummy features
Abstract:
The present disclosure provides one embodiment of an IC method that includes receiving an IC design layout, which has a plurality of main features and a plurality of space blocks. The IC method also includes calculating an optimized block dummy density ratio r0 to optimize an uniformity of pattern density (UPD), determining a target block dummy density ratio R, determining size, pitch and type of a non-printable dummy feature, generating a pattern for non-printable dummy features and adding the non-printable dummy features in the IC design layout.
Information query
Patent Agency Ranking
0/0